Description
Phosphoric Acid, 85 Percent, Electronic Grade is a mineral acid also known under the name othophosphoric acid. In compound semiconductor processing, phosphoric acid is a common wet etching agent: for example, in combination with hydrogen peroxide and water it is used to etch InGaAs selective to InP. Spectrum’s electronic grade chemicals have extremely low metals content and makes them an excellent choice for use in etching solutions for semiconductor chips and other sensitive electronics applications.
